DocumentCode
437237
Title
Programmable reconfigurable self-assembly: approaching the parallel heterogeneous integration on flexible substrates
Author
Chung, Jue-Hoon ; Zheng, Wei ; Jacobs, Heiko O.
Author_Institution
Dept. of Electr. & Comput. Eng., Minnesota Univ., Minneapolis, MN, USA
fYear
2005
fDate
30 Jan.-3 Feb. 2005
Firstpage
572
Lastpage
575
Abstract
This paper reports on a programmable reconfigurable liquid solder directed self assembly (PRS) method to enable parallel heterogeneous integration of components on nonplanar substrates. Metal contacts on segmented semiconductor devices bind to liquid-solder-based-receptors on a substrate surface during the fluidic self assembly. Programmability is implemented using solder-based receptors that can be switched "On" and "Off" using integrated heaters. This programmability enables the heterogeneous batch integration of components by sequentially activating selected receptors. We fabricated a prototype substrate to experimentally test the feasibility of PRS and successfully demonstrate the programmable assembly of multiple types of components onto target positions.
Keywords
microfluidics; self-assembly; solders; flexible substrates; fluidic self assembly; integrated heaters; liquid solder based receptors; liquid solder directed self assembly; metal contacts; nonplanar substrates; parallel heterogeneous integration; programmable reconfigurable assembly; semiconductor devices; Assembly systems; Contacts; Fabrication; Jacobian matrices; Prototypes; Robotic assembly; Self-assembly; Semiconductor devices; Substrates; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
ISSN
1084-6999
Print_ISBN
0-7803-8732-5
Type
conf
DOI
10.1109/MEMSYS.2005.1453994
Filename
1453994
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