• DocumentCode
    437237
  • Title

    Programmable reconfigurable self-assembly: approaching the parallel heterogeneous integration on flexible substrates

  • Author

    Chung, Jue-Hoon ; Zheng, Wei ; Jacobs, Heiko O.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Minnesota Univ., Minneapolis, MN, USA
  • fYear
    2005
  • fDate
    30 Jan.-3 Feb. 2005
  • Firstpage
    572
  • Lastpage
    575
  • Abstract
    This paper reports on a programmable reconfigurable liquid solder directed self assembly (PRS) method to enable parallel heterogeneous integration of components on nonplanar substrates. Metal contacts on segmented semiconductor devices bind to liquid-solder-based-receptors on a substrate surface during the fluidic self assembly. Programmability is implemented using solder-based receptors that can be switched "On" and "Off" using integrated heaters. This programmability enables the heterogeneous batch integration of components by sequentially activating selected receptors. We fabricated a prototype substrate to experimentally test the feasibility of PRS and successfully demonstrate the programmable assembly of multiple types of components onto target positions.
  • Keywords
    microfluidics; self-assembly; solders; flexible substrates; fluidic self assembly; integrated heaters; liquid solder based receptors; liquid solder directed self assembly; metal contacts; nonplanar substrates; parallel heterogeneous integration; programmable reconfigurable assembly; semiconductor devices; Assembly systems; Contacts; Fabrication; Jacobian matrices; Prototypes; Robotic assembly; Self-assembly; Semiconductor devices; Substrates; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-8732-5
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2005.1453994
  • Filename
    1453994