DocumentCode
437239
Title
Multi-step sequential batch self-assembly of three-dimensional micro-structures using magnetic field
Author
Iwase, Eiji ; Shimoyama, Isao
Author_Institution
Dept. of Mechano-Informatics, Tokyo Univ., Japan
fYear
2005
fDate
30 Jan.-3 Feb. 2005
Firstpage
588
Lastpage
591
Abstract
We have developed a process for multistep sequential batch self assembly of complex three dimensional ferromagnetic microstructures. The process uses the magnetic torque generated by an external magnetic field perpendicular to the substrate to lift hinged structures. In our previous study, we found that a nondimensional factor that depends on its shape determines the sensitivity of the micro hinged structures to a magnetic field. This factor can be used as a criterion in designing a process for sequential batch self assembly, because the factor indicates the differences in the sensitivity. In this study, we designed multistep sequential assembly by using the nondimensional factor. Four step sequential batch assembly was demonstrated using this method.
Keywords
ferromagnetic materials; magnetic fields; magnetomechanical effects; nanostructured materials; nanotechnology; self-assembly; sensitivity; torque; 3D ferromagnetic microstructures; hinged structures lifting; magnetic field; magnetic torque; micro hinged structures; multistep sequential batch self assembly; nondimensional factor; Assembly; Fasteners; Magnetic fields; Magnetic materials; Micromagnetics; Nickel; Resists; Self-assembly; Shape; Thermal force;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
ISSN
1084-6999
Print_ISBN
0-7803-8732-5
Type
conf
DOI
10.1109/MEMSYS.2005.1453998
Filename
1453998
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