Title :
Resolution in nanofabrication by electron-beam induced deposition combined with low energy ion milling
Author :
Mitsuishi, K. ; Shimojo, Makoto ; Tanaka, M. ; Takeguchi, M. ; Furuya, K.
Keywords :
Electron beams; Energy resolution; Fabrication; Gold; Materials science and technology; Milling; Nanofabrication; Nanostructured materials; Nanostructures; Scanning electron microscopy;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
DOI :
10.1109/IMNC.2004.245752
