Title :
Fabrication and characterization of nano-dots produced by electron beam induced deposition using metal carbonyls
Author :
Shimojo, M. ; Takeguchi, M. ; Mitsuishi, K. ; Tanaka, Mitsuru ; Furuya, K.
Keywords :
Diffraction; Electron beams; Fabrication; Heat treatment; Iron; Materials science and technology; Nanoscale devices; Nanostructures; Shape; Voltage;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
DOI :
10.1109/IMNC.2004.245765
