Fabrication and characterization of nano-dots produced by electron beam induced deposition using metal carbonyls

Author

Shimojo, M. ; Takeguchi, M. ; Mitsuishi, K. ; Tanaka, Mitsuru ; Furuya, K.

fYear

2004

fDate

Oct. 27-29, 2004

Firstpage

144

Lastpage

145

Keywords

Diffraction; Electron beams; Fabrication; Heat treatment; Iron; Materials science and technology; Nanoscale devices; Nanostructures; Shape; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International

Print_ISBN

4-99024720-5

Type

DOI

10.1109/IMNC.2004.245765

Filename

1459515

Link To Document