DocumentCode
437335
Title
Optical microdevice fabrication on optical fiber by FIB-CVD
Author
Igaki, J. ; Watanabe, K. ; Kanda, K. ; Haruyama, Y. ; Fujita, J. ; Kaito, T. ; Tajima, T. ; Matsui, S.
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
254
Lastpage
255
Keywords
Chemical vapor deposition; Coatings; Etching; Fiber gratings; Focusing; Lithography; Optical device fabrication; Optical fibers; Optical films; Production facilities;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245806
Filename
1459572
Link To Document