DocumentCode :
437335
Title :
Optical microdevice fabrication on optical fiber by FIB-CVD
Author :
Igaki, J. ; Watanabe, K. ; Kanda, K. ; Haruyama, Y. ; Fujita, J. ; Kaito, T. ; Tajima, T. ; Matsui, S.
fYear :
2004
fDate :
Oct. 27-29, 2004
Firstpage :
254
Lastpage :
255
Keywords :
Chemical vapor deposition; Coatings; Etching; Fiber gratings; Focusing; Lithography; Optical device fabrication; Optical fibers; Optical films; Production facilities;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
Type :
conf
DOI :
10.1109/IMNC.2004.245806
Filename :
1459572
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=437335
