Title :
Design and fabrication of an IC compatible on-chip thermoelectric cooler
Author :
Kang, Ik-Su ; Kong, Seong Ho
Keywords :
Biological materials; Biomembranes; Conducting materials; Electronics cooling; Fabrication; Temperature control; Thermal conductivity; Thermoelectric devices; Thermoelectricity; Transistors;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
DOI :
10.1109/IMNC.2004.245659
