Title :
Fabrication of the 3-D SU-8 fine micromesh and electroplated Ni micromesh structures
Author :
Sato, Hironobu ; Houshi, Yoshitaka ; Otsuka, Toshlharu ; Shoji, Shuichi
Keywords :
Chromium; Electrodes; Fabrication; Glass; Gold; Lithography; Microchannel; Micromechanical devices; Resists; Shape;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
DOI :
10.1109/IMNC.2004.245664
