مرکز منطقه ای اطلاع رساني علوم و فناوري - Development of 3D-LIGA process to fabricate spiral microcoil

DocumentCode :

437342

Title :

Development of 3D-LIGA process to fabricate spiral microcoil

Author :

Mekaru, Harutaka ; Kusumi, Shinji ; Sato, Nobuyoshi ; Shimizu, Maiko ; Yamashita, Michiru ; Shimada, Osamu ; Hattori, Tadashi

fYear :

2004

fDate :

Oct. 27-29, 2004

Firstpage :

330

Lastpage :

331

Keywords :

Chemicals; Coils; Copper; Injection molding; Nickel; Production; Resins; Spirals; Temperature; X-ray lithography;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International

Print_ISBN :

4-99024720-5

Type :

conf

DOI :

10.1109/IMNC.2004.245630

Filename :

1459611

Link To Document :