Title :
Magnetic patterning of FePt thin films using ion implantation
Author :
Aoyama, Tsutomu ; Sato, Isamu ; Ishio, Shunji
Author_Institution :
TDK Corp., Nagano, Japan
Abstract :
In this report, the experimental results of implanting different ions to the specified area using a stencil mask and feasibility of fabricating magnetic pattern with a large coercivity difference were shown.
Keywords :
coercive force; ferromagnetic materials; ion implantation; iron alloys; magnetic thin films; masks; metallic thin films; platinum alloys; FePt; coercivity; ion implantation; magnetic patterning; stencil mask; thin films; Annealing; Chromium; Coercive force; Ion implantation; Magnetic films; Rough surfaces; Sputtering; Surface roughness; Temperature; Transistors;
Conference_Titel :
Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International
Print_ISBN :
0-7803-9009-1
DOI :
10.1109/INTMAG.2005.1463865
