A new method for model based frugal OPC

Author

Yan, Xiaolang ; Chen, Ye ; Shi, Zheng ; Ma, Yue

Author_Institution

Inst. of VLSI Design, Zhejiang Univ., Hangzhou, China

Volume

1

fYear

2005

fDate

18-21 Jan. 2005

Firstpage

83

Abstract

Improvements on resolution enhancement technologies (RETs) enable minimum feature size of IC to shrink consistently with Moore´s Law. However growing mask data volume also tremendously increases manufacture cost. The cost increase is partially due to the complicated optical proximity corrections applied on mask design. Frugal OPC methods have been introduced to reduce the complexity. In this paper, a new method for frugal OPC is presented. Based on recognition of critical spots under yield related constraints, the new correction flow keeps fidelity on critical sites while still retaining the frugality of modified designs.

Keywords

integrated circuit design; integrated circuit yield; proximity effect (lithography); Moore Law; frugal OPC methods; integrated circuit yield; mask data volume; mask design; optical proximity corrections; resolution enhancement technologies; Costs; Error correction; Lighting; Manufacturing; Moore´s Law; Optical distortion; Optical scattering; Production; Shape; Writing;

fLanguage

English

Publisher

ieee

Conference_Titel

Design Automation Conference, 2005. Proceedings of the ASP-DAC 2005. Asia and South Pacific

Print_ISBN

0-7803-8736-8

Type

conf

DOI

10.1109/ASPDAC.2005.1466135

Filename

1466135