Title :
Die stress characterization using arrays of CMOS sensors
Author :
Bradley, A.T. ; Jaeger, R.C. ; Suhling, J.C. ; Zou, Yao ; Zou, Y.
Author_Institution :
Auburn University, Auburn, AL
Abstract :
This paper presents theory for application of FET devices as mechanical stress sensors and demonstrates the use of CMOS FET differential pairs as practical temperature insensitive sensors. By controlling the type and orientation of the pairs, both the difference of the in-plane normal stresses as well as the in-plane shear stress can be extracted on the
Keywords :
FETs; MOSFETs; Mechanical sensors; Piezoresistance; Resistors; Sensor arrays; Sensor phenomena and characterization; Stress; Temperature sensors; Threshold voltage;
Conference_Titel :
Solid-State Circuits Conference, 1998. ESSCIRC '98. Proceedings of the 24th European
DOI :
10.1109/ESSCIR.1998.186311