A low power ASIC for the control of a mobile micro-actuator array

The design and measurements of a low-power ASIC controlling the actuation of a piezoelectric microfabricated actuator array capable of locomotion is reported. The circuit, which is powered by a solar cell, has an integrated photodiode and the appropriate front-end for the reception of an infrared pulse stream that encodes the direction and pace of motion of the actuators. It also features a variable frequency oscillator and a sequencer controlling low power high voltage drivers capable of handling voltages as high as -10V and +20V, though the circuit was implemented in a conventional sub-micron 5V technology. The circuit operates at 2 volts, with a power consumption of a few microwatts under the strong background illumination necessary to power the actuators.