Title :
An absolute air pressure smart sensor family with 2 dimensional calibration
Author :
Weiler, D. ; Machul, O. ; Amelung, J. ; Hammerschmidt, D. ; Hosticka, B.J.
Author_Institution :
Fraunhofer Institute of Microelectronic Circuits and Systems(IMS), Duisburg, Germany
Abstract :
We present a monolithic pressure transducer family with on-chip pressure sensor, readout, linearization, and temperature compensation reaching an 1% accuracy after calibration. Temperature compensation and linearization are realized by two dimensional pwl interpolation using ΣΔ-modulators. This accuracy requires only a few calibration points for full pressure and temperature range. A prototype sensor system has been fabricated in an 1.2µm CMOS-process with surface mircomachining extension and occupies a chip area of 11.8mm2. The power consumption of this sensor system is ca. 6mW.
Keywords :
Bipolar transistors; Calibration; Capacitive sensors; Capacitors; Finite impulse response filter; Intelligent sensors; Sensor arrays; Sensor systems; Temperature sensors; Voltage;
Conference_Titel :
Solid-State Circuits Conference, 1999. ESSCIRC '99. Proceedings of the 25th European
Conference_Location :
Duisburg, Germany
