DocumentCode :
439978
Title :
"Processes for compact LOCOS integrated circuits"
Author :
Kooi, E. ; Brandt, Brian ; Shappir, Joseph
Volume :
17
fYear :
1971
fDate :
1971
Firstpage :
4
Lastpage :
5
Keywords :
Art; Etching; Integrated circuit technology; Laboratories;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices Meeting, 1971 International
Conference_Location :
IEEE
Type :
conf
Filename :
1476811
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=439978
