Title :
"Ion implantation of N+buried layers for silicon integrated circuits"
Author :
Drum, C.M. ; Miller, Paul
Keywords :
Doping; Implants; Ion implantation; Laboratories; Laser beams; Silicon; Surface emitting lasers; Surface topography; Telephony; Temperature control;
Conference_Titel :
Electron Devices Meeting, 1971 International
Conference_Location :
IEEE
