DocumentCode

440021

Title

Comparison of Auger depth profiles and C/V—Measurements on silicon oxides on Si

Author

Johannessen, J.S. ; Spicer, W.E. ; Strausser, Y.E.

Volume

21

fYear

1975

fDate

1975

Firstpage

3

Lastpage

4

Keywords

Discharges; Displays; MOS capacitors; MOS devices; Morphology; Silicon; Solid modeling; Solid state circuits; Voltage; Wafer bonding;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1975 International

Conference_Location

IEEE

Type

conf

Filename

1478333