• DocumentCode
    440035
  • Title

    Oxygen recoil during implantation of as into SiO2films

  • Author

    Goetzberger, A. ; Bartelink, D.J. ; McVittie, James P. ; Gibbons, J.F.

  • Volume
    21
  • fYear
    1975
  • fDate
    1975
  • Firstpage
    15
  • Lastpage
    16
  • Keywords
    Current measurement; Implants; Impurities; Oxygen; Photonic band gap; Semiconductor films; Switches; Temperature distribution; Temperature measurement; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1975 International
  • Conference_Location
    IEEE
  • Type

    conf

  • Filename
    1478347
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=440035