440207

The first Product on 300 mm Wafer - 64 Mb DRAM

Kraxenberger, Manfred

Semiconductor 300, Dresden, Germany

1

1999

13-15 Sept. 1999

2

2

Art; Cost function; Electronics industry; International collaboration; Investments; Optimized production technology; Random access memory; Semiconductor device manufacture; Silicon; Throughput;

English

ieee

Solid-State Device Research Conference, 1999. Proceeding of the 29th European

Leuven, Belgium

2-86332-245-1

conf

1505441