440210

75 GHz Bipolar Production Technology for the 21st Century

Klein, Wolfgang ; Klepser, Bemd-Ulrich H.

Infineon Technologies, Munich, Germany

1

1999

13-15 Sept. 1999

88

94

CMOS process; CMOS technology; Cutoff frequency; Epitaxial growth; Germanium silicon alloys; Integrated circuit technology; Noise figure; Parasitic capacitance; Production; Silicon germanium;

English

ieee

Solid-State Device Research Conference, 1999. Proceeding of the 29th European

Leuven, Belgium

2-86332-245-1

conf

1505453