DocumentCode :
440222
Title :
Nanopotentiometry: Data Interpretation and Quantification
Author :
Haegeman, B. ; Trenkler, T. ; Eyben, P. ; Vandervorst, W. ; De Wolf, P. ; Hellemans, L.
Author_Institution :
IMEC, Leuven, Belgium
Volume :
1
fYear :
1999
fDate :
13-15 Sept. 1999
Firstpage :
192
Lastpage :
195
Keywords :
Analytical models; Atomic force microscopy; Atomic measurements; CMOS process; Calibration; Failure analysis; Nanoscale devices; Predictive models; Probes; Semiconductor device modeling;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Conference_Location :
Leuven, Belgium
Print_ISBN :
2-86332-245-1
Type :
conf
Filename :
1505472
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=440222
