• DocumentCode
    440222
  • Title

    Nanopotentiometry: Data Interpretation and Quantification

  • Author

    Haegeman, B. ; Trenkler, T. ; Eyben, P. ; Vandervorst, W. ; De Wolf, P. ; Hellemans, L.

  • Author_Institution
    IMEC, Leuven, Belgium
  • Volume
    1
  • fYear
    1999
  • fDate
    13-15 Sept. 1999
  • Firstpage
    192
  • Lastpage
    195
  • Keywords
    Analytical models; Atomic force microscopy; Atomic measurements; CMOS process; Calibration; Failure analysis; Nanoscale devices; Predictive models; Probes; Semiconductor device modeling;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 1999. Proceeding of the 29th European
  • Conference_Location
    Leuven, Belgium
  • Print_ISBN
    2-86332-245-1
  • Type

    conf

  • Filename
    1505472
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=440222