Title :
Investigation of Stress in STI using UV-Raman Spectroscopy
Author :
Dombrowski, K.F. ; Dietrich, B. ; De Wolf, I. ; Rooyackers, R. ; Badenes, G.
Author_Institution :
IHP, Frankfurt/Oder, Germany
Keywords :
Compressive stress; Laser excitation; Phonons; Plasma measurements; Raman scattering; Silicon; Spectroscopy; Stress measurement; Tensile stress; Wavelength measurement;
Conference_Titel :
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Conference_Location :
Leuven, Belgium
Print_ISBN :
2-86332-245-1
