Title :
A Cost Effective Integration Technology for High Density DRAM merged with High Performance Logic
Author :
Ha, Daewon ; Shin, Dongwon ; Koh, Gwanhyeob ; Lee, Jaegu ; Lee, Sanghyeon ; Jeong, Hongsik ; Chung, TaeYoung ; Kim, Kinam
Author_Institution :
Samsung Electronics Co., Kyungki-Do, Korea
Keywords :
Bandwidth; Capacitors; Costs; Energy consumption; Foot; Leakage current; Logic arrays; Logic circuits; Logic devices; Random access memory;
Conference_Titel :
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Conference_Location :
Leuven, Belgium
Print_ISBN :
2-86332-245-1