Title :
Full quantummechanical treatment of charge leakage in MOS capacitors with ultra-thin oxide layers
Author :
Magnus, Wim ; Schoenmaker, Wim
Author_Institution :
IMEC, Leuven, Belgium
Keywords :
Electrons; Energy states; Leakage current; MOS capacitors; MOSFETs; Particle scattering; Potential energy; Resonance; Silicon; Wave functions;
Conference_Titel :
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Conference_Location :
Leuven, Belgium
Print_ISBN :
2-86332-245-1
