Title :
Investigation of the Threshold Voltage Difference between Partially-Depleted SOI and bulk CMOS transistors
Author :
Meer, Hans Van ; Lyu, Jeong-Ho ; Kubicek, S. ; Meyer, Kristin De
Author_Institution :
IMEC, Leuven, Belgium
Keywords :
Boron; CMOS process; CMOS technology; Doping; Fabrication; Indium; MOS devices; MOSFETs; Silicon; Threshold voltage;
Conference_Titel :
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Conference_Location :
Leuven, Belgium
Print_ISBN :
2-86332-245-1
