مرکز منطقه ای اطلاع رساني علوم و فناوري - High performance raised Gate/Source/Drain transistors for sub-0.15 um CMOS technologies

DocumentCode :

440266

Title :

High performance raised Gate/Source/Drain transistors for sub-0.15 um CMOS technologies

Author :

Meer, H. Van ; Kubicek, S. ; Lyu, Jianguo ; Caymax, M. ; Loo, R. ; Meyer, K. De

Author_Institution :

IMEC, Leuven, Belgium

Volume :

fYear :

1999

fDate :

13-15 Sept. 1999

Firstpage :

388

Lastpage :

391

Keywords :

Boron; CMOS technology; Fabrication; Implants; Isolation technology; Lithography; MOSFETs; Rapid thermal processing; Silicon; Space technology;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Solid-State Device Research Conference, 1999. Proceeding of the 29th European

Conference_Location :

Leuven, Belgium

Print_ISBN :

2-86332-245-1

Type :

conf

Filename :

1505521

Link To Document :