Title :
The Effect of Oxide Patterned Layers on the Rapid Thermal Oxidation of Polycrystalline Silicon
Author :
Sullivan, B. J O ; Hurley, P.K. ; Mathewson, A. ; Beanland, R. ; Rodrigues, R. ; Kay, P.
Author_Institution :
National Microelectronics Research Centre, Cork, Ireland
Keywords :
Annealing; Capacitors; Contacts; Dielectrics; Materials science and technology; Microelectronics; Oxidation; Semiconductor films; Silicon compounds; Temperature measurement;
Conference_Titel :
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Conference_Location :
Leuven, Belgium
Print_ISBN :
2-86332-245-1
