Title :
Compact modelling of pocket-implanted MOSFETs
Author :
Scholten, A.J. ; Duffy, R. ; van Langevelde, R. ; Klaassen, D.B.M.
Author_Institution :
Philips Research Laboratories, Eindhoven, The Netherlands
fDate :
11-13 September 2001
Keywords :
Analytical models; CMOS technology; Implants; Laboratories; MOSFETs; Medical simulation; Scattering; Semiconductor device modeling; Semiconductor process modeling; Threshold voltage;
Conference_Titel :
Solid-State Device Research Conference, 2001. Proceeding of the 31st European
Print_ISBN :
2-914601-01-8
DOI :
10.1109/ESSDERC.2001.195263