DocumentCode
44093
Title
2013 International Electron Devices Meeting
Volume
26
Issue
2
fYear
2013
fDate
May-13
Firstpage
260
Lastpage
260
Abstract
Describes the above-named upcoming conference event. May include topics to be covered or calls for papers.
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2013.2260994
Filename
6512075
Link To Document