DocumentCode
44157
Title
Complex Plasma Structure Observed in the Inlet of an Argon Radio-Frequency Discharge
Author
Lemmer, K.M. ; Kirtley, D.E.
Author_Institution
Dept. of Mech. & Aerosp. Eng., Western Michigan Univ., Kalamazoo, MI, USA
Volume
42
Issue
12
fYear
2014
fDate
Dec. 2014
Firstpage
4038
Lastpage
4039
Abstract
The presented image was created in the inlet of an argon helicon source. In addition to the helicon mode plasma downstream, there are several competing plasma effects and complex structures that have led to this unique image. The plasma clusters are likely caused by the confinement of plasma within the narrow inlet section of the quartz tube combined with the high cold gas inlet flow rate and the ionization section encroaching upon the inlet tube. These factors have caused the gas to ionize, accelerate through the magnetic field, and be shocked due to the narrow inlet cross section. Other phenomena are investigated and shown to not cause the image.
Keywords
argon; helicons; high-frequency discharges; ionisation; plasma diagnostics; plasma sources; quartz; SiO2; argon helicon source; argon radio-frequency discharge; cold gas inlet flow rate; ionization section; plasma clusters; plasma structure; quartz tube; Argon; Electron tubes; Ionization; Magnetic noise; Magnetic resonance imaging; Magnetic shielding; Plasmas; Plasma confinement; plasma devices; plasma devices.;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2014.2367317
Filename
6957582
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