• DocumentCode
    44157
  • Title

    Complex Plasma Structure Observed in the Inlet of an Argon Radio-Frequency Discharge

  • Author

    Lemmer, K.M. ; Kirtley, D.E.

  • Author_Institution
    Dept. of Mech. & Aerosp. Eng., Western Michigan Univ., Kalamazoo, MI, USA
  • Volume
    42
  • Issue
    12
  • fYear
    2014
  • fDate
    Dec. 2014
  • Firstpage
    4038
  • Lastpage
    4039
  • Abstract
    The presented image was created in the inlet of an argon helicon source. In addition to the helicon mode plasma downstream, there are several competing plasma effects and complex structures that have led to this unique image. The plasma clusters are likely caused by the confinement of plasma within the narrow inlet section of the quartz tube combined with the high cold gas inlet flow rate and the ionization section encroaching upon the inlet tube. These factors have caused the gas to ionize, accelerate through the magnetic field, and be shocked due to the narrow inlet cross section. Other phenomena are investigated and shown to not cause the image.
  • Keywords
    argon; helicons; high-frequency discharges; ionisation; plasma diagnostics; plasma sources; quartz; SiO2; argon helicon source; argon radio-frequency discharge; cold gas inlet flow rate; ionization section; plasma clusters; plasma structure; quartz tube; Argon; Electron tubes; Ionization; Magnetic noise; Magnetic resonance imaging; Magnetic shielding; Plasmas; Plasma confinement; plasma devices; plasma devices.;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2014.2367317
  • Filename
    6957582