DocumentCode :
44157
Title :
Complex Plasma Structure Observed in the Inlet of an Argon Radio-Frequency Discharge
Author :
Lemmer, K.M. ; Kirtley, D.E.
Author_Institution :
Dept. of Mech. & Aerosp. Eng., Western Michigan Univ., Kalamazoo, MI, USA
Volume :
42
Issue :
12
fYear :
2014
fDate :
Dec. 2014
Firstpage :
4038
Lastpage :
4039
Abstract :
The presented image was created in the inlet of an argon helicon source. In addition to the helicon mode plasma downstream, there are several competing plasma effects and complex structures that have led to this unique image. The plasma clusters are likely caused by the confinement of plasma within the narrow inlet section of the quartz tube combined with the high cold gas inlet flow rate and the ionization section encroaching upon the inlet tube. These factors have caused the gas to ionize, accelerate through the magnetic field, and be shocked due to the narrow inlet cross section. Other phenomena are investigated and shown to not cause the image.
Keywords :
argon; helicons; high-frequency discharges; ionisation; plasma diagnostics; plasma sources; quartz; SiO2; argon helicon source; argon radio-frequency discharge; cold gas inlet flow rate; ionization section; plasma clusters; plasma structure; quartz tube; Argon; Electron tubes; Ionization; Magnetic noise; Magnetic resonance imaging; Magnetic shielding; Plasmas; Plasma confinement; plasma devices; plasma devices.;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.2014.2367317
Filename :
6957582
Link To Document :
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