Title :
Nanohandling automation within a scanning electron microscope
Author :
Wich, T. ; Sievers, T. ; Jähnisch, M. ; Hülsen, H. ; Fatikow, S.
Author_Institution :
Div. Microrobotics & Control Eng., Oldenburg Univ., Germany
Abstract :
In this paper, current research regarding a semi-automated handling station for TEM-lamella is described. The development of this station started with automated handling of microparts as described in many previous publications. However, within this project, we were able to apply current research to an economically important task for the semiconductor industry - TEM-lamella handling. This task consists of automatic tracking of the lamella, picking it up from the silicon wafer and placing it on a TEM-grid.
Keywords :
electronic engineering computing; materials handling; nanotechnology; scanning electron microscopes; semiconductor device manufacture; transmission electron microscopy; TEM-lamella handling; automatic tracking; nanohandling automation; scanning electron microscope; semiautomated handling station; semiconductor industry; silicon wafer; Automation; Circuit testing; Control engineering; Electron microscopy; Electronic equipment testing; Electronics industry; Electrostatics; Hardware; Low earth orbit satellites; Scanning electron microscopy;
Conference_Titel :
Industrial Electronics, 2005. ISIE 2005. Proceedings of the IEEE International Symposium on
Conference_Location :
Dubrovnik, Croatia
Print_ISBN :
0-7803-8738-4
DOI :
10.1109/ISIE.2005.1529072
