DocumentCode
44251
Title
Best Paper Award and Changes to the Editorial Board
Author
Cunningham, Sean P.
Author_Institution
Intel Corporation, Santa Clara, CA, USA
Volume
26
Issue
2
fYear
2013
fDate
May-13
Firstpage
177
Lastpage
177
Abstract
The editors chose "Lens Heating Induced Aberration Prediction via Nonlinear Kalman Filters," by Can Bikcora, Martiijn van Veelen, Siep Weiland, and Wim M. J. Coene, as the Best Paper for the Transactions published in 2012.
Keywords
Awards;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2013.2259319
Filename
6512092
Link To Document