مرکز منطقه ای اطلاع رساني علوم و فناوري

DocumentCode :

443070

Title :

Deeply Etched S.A.W. Resonators

Author :

Adams, Charles A. ; Kusters, John A.

fYear :

1977

fDate :

1977

Firstpage :

246

Lastpage :

250

Keywords :

Acoustic devices; Aluminum; Etching; Gratings; Plasma temperature; Resists; Resonance; Stability; Surface acoustic wave devices; Surface acoustic waves;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

31st Annual Symposium on Frequency Control. 1977

Type :

conf

DOI :

10.1109/FREQ.1977.200155

Filename :

1537095

Link To Document :

https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=443070