Title :
Inductance calculation of thick-metal inductors
Author :
Scuderi, A. ; Biondi, T. ; Ragonese, E. ; Palmisano, G.
Author_Institution :
DIEES, Universita di Catania, Italy
Abstract :
In this paper, the analysis and modeling of thick-metal spiral inductors are addressed. The accuracy of a 2.5 D electromagnetic simulator is first validated by comparison with on-wafer experimental measurements. Simulation results are then employed to investigate the effect of metal thickening on inductor performance. The inductance decrease due to metal thickening is modeled by using a modified current-sheet expression. The proposed formula achieves higher accuracy compared to the original one revealing errors below 5% even for thickness-to-width ratio up to 2.5.
Keywords :
inductance; semiconductor device models; thick film inductors; current-sheet expression; electromagnetic simulator; inductance calculation; metal thickening; thick-metal spiral inductors; Electromagnetic measurements; Fabrication; Inductance; Inductors; Integrated circuit technology; Predictive models; Q factor; Radio frequency; Silicon; Spirals;
Conference_Titel :
Research in Microelectronics and Electronics, 2005 PhD
Print_ISBN :
0-7803-9345-7
DOI :
10.1109/RME.2005.1543037
