Title :
Cantilever based MEMS for multiple mass sensing
Author :
Villarroya, María ; Verd, Jaume ; Teva, Jordi ; Abadal, Gabriel ; Pérez, Francesc ; Esteve, Jaume ; Barniol, Núria
Author_Institution :
Departament d´´Enginyeria Electronica, Univ. Autonoma de Barcelona, Spain
Abstract :
A cantilever based micro electro mechanical system (MEMS) for mass detection is presented. The sensor for multiple detections is composed by several cantilevers in an array configuration integrated monolithically with CMOS. Cantilevers are excited electrostatically to its resonance frequency. The oscillation of the microcantilever is detected by a capacitive detection technique. Mass variation is detected by resonance frequency shifting. The mechanical transducers are fabricated after CMOS process on polysilicon, one of the CMOS layers. Optical lithography is used for the cantilevers definitions. Cantilevers of 50 μm length, 1.1 μm wide and 600 nm thick have been defined. This sensor provides a mass sensitivity of 70 ag/Hz.
Keywords :
CMOS integrated circuits; cantilevers; capacitive sensors; mass measurement; microsensors; photolithography; 1.1 micron; 50 micron; 600 nm; CMOS process; MEMS; capacitive detection; electrostatic excitation; mass variation detection; mechanical transducers; micro electro mechanical system; microcantilevers; multiple mass detections; multiple mass sensing; optical lithography; resonance frequency shifting; CMOS process; Lithography; Mechanical sensors; Mechanical systems; Micromechanical devices; Optical sensors; Resonance; Resonant frequency; Sensor arrays; Transducers;
Conference_Titel :
Research in Microelectronics and Electronics, 2005 PhD
Print_ISBN :
0-7803-9345-7
DOI :
10.1109/RME.2005.1543038
