Title :
Test pattern for microwave dielectric properties of SrBi2Ta2O9
Author :
Delmonte, Nicola ; Watts, Bernard Enrico ; Rosa, Lorenzo ; Chiorboli, Giovanni ; Cova, Paolo ; Menozzi, Roberto
Author_Institution :
Dipt. di Ingegneria dell´´Informazione, Parma Univ., Italy
Abstract :
A test structure employing a one-step lithography process has been built for measuring the complex impedance of ferroelectric capacitors at microwaves. The measurements are compared to the results of a finite element analysis with the aim of developing an electrical model of the test structure in which parasitic elements appear. These elements can be experimentally measured and partially de-embedded. The purpose of this paper is the characterization of strontium-bismuth tantalate (SBT) capacitors for microwave ICs or SoCs.
Keywords :
bismuth compounds; dielectric properties; electron device testing; ferroelectric capacitors; lithography; microwave integrated circuits; strontium compounds; thin film capacitors; SrBi2Ta2O9; electrical model; ferroelectric capacitors; microwave dielectric properties; microwave integrated circuits; one-step lithography process; parasitic elements; strontium-bismuth tantalate capacitors; test structures; Capacitors; Dielectric measurements; Electric variables measurement; Ferroelectric materials; Finite element methods; Impedance measurement; Lithography; Microwave measurements; Strontium; Testing;
Conference_Titel :
Research in Microelectronics and Electronics, 2005 PhD
Print_ISBN :
0-7803-9345-7
DOI :
10.1109/RME.2005.1543044
