Title :
High resolution subsurface thermal imaging using a numerical aperture increasing lens
Author :
Eraslan, M.G. ; Vamivakas, A.N. ; Ippolito, S.B. ; Ünlü, M.S. ; Goldberg, B.B.
Author_Institution :
Dept. of Phys., Boston Univ., MA, USA
Abstract :
We investigate the experimental limitations of the maximum resolution that can be achieved in far-field subsurface thermal imaging with a numerical aperture increasing lens- High-resolution thermal imaging has applications in failure analysis of Si integrated circuits.
Keywords :
image resolution; infrared imaging; lenses; silicon; Si; Si integrated circuits; high resolution subsurface thermal imaging; lens; numerical aperture; Apertures; High-resolution imaging; Image resolution; Lenses; Nails; Optical imaging; Optical refraction; Optical variables control; Spatial resolution; Thermal lensing;
Conference_Titel :
Quantum Electronics and Laser Science Conference, 2005. QELS '05
Print_ISBN :
1-55752-796-2
DOI :
10.1109/QELS.2005.1548787
