Recent Developments in Superconductor Digital Electronics Technology at FLUXONICS Foundry

In Europe, the FLUXONICS Foundry develops fabrication processes and design kits for superconductor digital and mixed-signal circuits. We describe the implementation of the “European Roadmap for Superconductor Electronics” into the recent foundry process for superconductor digital electronics. Following the hierarchical cell-based design strategy, we developed a design kit with basic cells. We present experimental results of the process quality, the verified operation margins of the library cells, and the results of low- and high-speed investigations of test circuits. The process is suitable for the integration of complex digital and mixed-signal circuits for smart multichannel superconductor sensor applications with a digital interface.