DocumentCode
445344
Title
Cobalt silicide nanocrystal memory
Author
Zhao, Dengtao ; Zhu, Yan ; Li, Ruigang ; Liu, Jianlin
Volume
1
fYear
2005
fDate
June 20-22, 2005
Firstpage
105
Lastpage
106
Keywords
Capacitance; Capacitance-voltage characteristics; Cobalt; Etching; Furnaces; Nanocrystals; Nonvolatile memory; Random access memory; Silicides; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Device Research Conference Digest, 2005. DRC '05. 63rd
Print_ISBN
0-7803-9040-7
Type
conf
DOI
10.1109/DRC.2005.1553077
Filename
1553077
Link To Document