Title :
Increased reliability of a-Si TFT´s deposited on clear plastic substrates at high temperatures
Author :
Long, K. ; Kattamis, A. ; Cheng, I.-C. ; Gleskova, H. ; Wagner, S. ; Sturm, J.C.
Author_Institution :
Dept. of Electr. Eng., Princeton Univ., NJ
Abstract :
In this paper, the authors have developed an a-Si TFT process on clear plastic substrates which allows direct transfer of industry a-Si TFT process on glass to plastic substrate for flexible electronics applications. The high temperature process increases the reliability of the a-Si TFT´s, which is critical for OLED´s where one TFT must operate in a DC condition
Keywords :
amorphous semiconductors; flexible electronics; high-temperature techniques; plastics; reliability; silicon; substrates; thin film transistors; DC condition; OLED; Si; a-Si TFT process; clear plastic substrates; flexible electronics; high temperature process; Active matrix technology; Amorphous silicon; Flat panel displays; Glass industry; Organic light emitting diodes; Plastics; Substrates; Temperature; Thin film transistors; Threshold voltage;
Conference_Titel :
Device Research Conference Digest, 2005. DRC '05. 63rd
Conference_Location :
Santa Barbara, CA
Print_ISBN :
0-7803-9040-7
DOI :
10.1109/DRC.2005.1553094
