• DocumentCode
    445355
  • Title

    Increased reliability of a-Si TFT´s deposited on clear plastic substrates at high temperatures

  • Author

    Long, K. ; Kattamis, A. ; Cheng, I.-C. ; Gleskova, H. ; Wagner, S. ; Sturm, J.C.

  • Author_Institution
    Dept. of Electr. Eng., Princeton Univ., NJ
  • Volume
    1
  • fYear
    2005
  • fDate
    22-22 June 2005
  • Firstpage
    141
  • Lastpage
    142
  • Abstract
    In this paper, the authors have developed an a-Si TFT process on clear plastic substrates which allows direct transfer of industry a-Si TFT process on glass to plastic substrate for flexible electronics applications. The high temperature process increases the reliability of the a-Si TFT´s, which is critical for OLED´s where one TFT must operate in a DC condition
  • Keywords
    amorphous semiconductors; flexible electronics; high-temperature techniques; plastics; reliability; silicon; substrates; thin film transistors; DC condition; OLED; Si; a-Si TFT process; clear plastic substrates; flexible electronics; high temperature process; Active matrix technology; Amorphous silicon; Flat panel displays; Glass industry; Organic light emitting diodes; Plastics; Substrates; Temperature; Thin film transistors; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Device Research Conference Digest, 2005. DRC '05. 63rd
  • Conference_Location
    Santa Barbara, CA
  • Print_ISBN
    0-7803-9040-7
  • Type

    conf

  • DOI
    10.1109/DRC.2005.1553094
  • Filename
    1553094