Title :
"all-diamond-inkjet" for dispension of aggressive liquids
Author :
Müller, R. ; Berger, W. ; Janischowsky, K. ; Kohn, E.
Keywords :
Chemical vapor deposition; Glass; Inorganic materials; Microfluidics; Passivation; Piezoelectric actuators; Polymers; Printing; Thermal expansion; Thermal stresses;
Conference_Titel :
Device Research Conference Digest, 2005. DRC '05. 63rd
Print_ISBN :
0-7803-9040-7
DOI :
10.1109/DRC.2005.1553133
