Title :
Response kinetics of dielectric surface irradiated with ions to ozone influence
Author :
Arbuzov, Aleksey I. ; Dedkov, Vladimir S. ; Kabyshev, Alexander V. ; Lucanin, Alexander A.
Author_Institution :
High Voltage Res. Inst., Tomsk Polytech. Univ., Russia
fDate :
26 June-3 July 2004
Abstract :
Kinetics dependencies of electrical conduction of dielectrics irradiated with ions after influence ozone in air were considered. Possibility of the creation an ozone-sensitive elements on the base modified by ions BN and SiO2 was showed.
Keywords :
air; boron compounds; dielectric materials; ion beam effects; ozone; semiconductor materials; silicon compounds; surface conductivity; surface resistance; BN; SiO2; dielectric surface; dielectrics; electrical conduction; ion irradiation; ozone influence; ozone-sensitive elements; response kinetics; surface resistance; Atmospheric measurements; Ceramics; Dielectric measurements; Dielectric substrates; Glass; Kinetic theory; Phase change materials; Semiconductivity; Surface resistance; Surface treatment;
Conference_Titel :
Science and Technology, 2004. KORUS 2004. Proceedings. The 8th Russian-Korean International Symposium on
Print_ISBN :
0-7803-8383-4
DOI :
10.1109/KORUS.2004.1555585
