DocumentCode
445752
Title
Multilevel kinoform optical elements in fused silica for high-power laser optics
Author
Atuchin, V.V. ; Kirpichnikov, A.V. ; Mikhailov, E.V. ; Soldatenkov, I.S.
Author_Institution
Inst. of Semicond. Phys., Russian Acad. of Sci., Novosibirsk, Russia
Volume
2
fYear
2004
fDate
26 June-3 July 2004
Firstpage
194
Abstract
The technology of kinoform optical elements in fused silica has been presented. Such diffraction phase optical elements as multilevel microlens arrays, randomizing phase masks and axicons have been fabricated and evaluated. Typical diffraction efficiency of eight-level phase microlens is as high as 84% at λ = 1.06μm.
Keywords
computer-generated holography; diffractive optical elements; masks; microlenses; optical arrays; optical fabrication; silicon compounds; 1.06 mum; 84 percent; SiO2; axicons; diffraction efficiency; diffraction phase optical elements; fused silica; high-power laser; kinoform; multilevel microlens arrays; phase masks; Etching; Laser beams; Laser theory; Lenses; Lithography; Microoptics; Optical arrays; Optical diffraction; Phased arrays; Silicon compounds;
fLanguage
English
Publisher
ieee
Conference_Titel
Science and Technology, 2004. KORUS 2004. Proceedings. The 8th Russian-Korean International Symposium on
Print_ISBN
0-7803-8383-4
Type
conf
DOI
10.1109/KORUS.2004.1555589
Filename
1555589
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