Title :
Sulfur reduction from SF6 by pulsed electronic beam
Author :
Ezhov, V.V. ; Vlasov, V.A. ; Pushkarev, A.I. ; Remnev, G.E. ; Sosnovskiy, S.A.
Author_Institution :
Tomsk Polytech. Univ., Russia
fDate :
26 June-3 July 2004
Abstract :
The experimental research results of sulfur hexafluoride decomposition in a mixture with nitrogen or hydrogen under the pulse electronic beam action are presented. The data of gas mixture composition changes in a reactor, measured by a mass-spectrometer are stated, electron beam power inputs on sulfur hexafluoride decomposition are given. Mathematical modeling of gas atmosphere low-temperature plasma (N2 and SF6), (H2 and SF6) at a pulse electronic beam injection are carried out.
Keywords :
dissociation; electron beam effects; hydrogen; mass spectra; nitrogen; plasma chemistry; reduction (chemical); sulphur compounds; H2-SF6; N2-SF6; electron beam power; gas mixture composition; low-temperature plasma; mass-spectrometer; mathematical modeling; pulse electronic beam action; pulse electronic beam injection; sulfur hexafluoride decomposition; Atmosphere; Atmospheric measurements; Electron beams; Hydrogen; Inductors; Mathematical model; Nitrogen; Plasma measurements; Power measurement; Sulfur hexafluoride;
Conference_Titel :
Science and Technology, 2004. KORUS 2004. Proceedings. The 8th Russian-Korean International Symposium on
Print_ISBN :
0-7803-8383-4
DOI :
10.1109/KORUS.2004.1555595
