• DocumentCode
    446087
  • Title

    Bayesian neural networks for nonlinear multivariate manufacturing process monitoring

  • Author

    Zhang, Feng

  • Author_Institution
    Fairchild Semicond., ME, USA
  • Volume
    4
  • fYear
    2005
  • fDate
    July 31 2005-Aug. 4 2005
  • Firstpage
    2308
  • Abstract
    As a linear method, PCA is not accurate for complicated processes control when nonlinear correlations are involved in the multivariate measurement variables. As one appealing nonlinear PCA method, principal curves generalized PCA to nonlinear domain and provide a better way to nonlinear feature extraction and dimension reduction. A multivariate process monitoring method based on Bayesian neural networks is proposed in this paper, which involves a projection network and a reconstruction network to represent the nonlinearities and helps avoid the overfitting problem in the weight parameter learning. Experimental study has illustrated the potential applicability of this method for nonlinear feature extraction and multivariate process monitoring.
  • Keywords
    belief networks; feature extraction; manufacturing processes; neural nets; principal component analysis; process monitoring; Bayesian neural network; nonlinear PCA; nonlinear feature extraction; nonlinear multivariate manufacturing process monitoring; Bayesian methods; Condition monitoring; Feature extraction; Feedforward neural networks; Iterative algorithms; Manufacturing processes; Neural networks; Principal component analysis; Process control; Vectors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Neural Networks, 2005. IJCNN '05. Proceedings. 2005 IEEE International Joint Conference on
  • Conference_Location
    Montreal, Que.
  • Print_ISBN
    0-7803-9048-2
  • Type

    conf

  • DOI
    10.1109/IJCNN.2005.1556261
  • Filename
    1556261