Title :
Membrane supported 77 GHZ Yagi-Uda antennae: design and experiment
Author :
Neculoiu, D. ; Muller, A. ; Vasilache, D. ; Petrini, I. ; Buiculescu, C. ; Plana, R. ; Pons, P. ; Bary, L. ; Saadaoui, M.
Author_Institution :
IMT, Bucharest, Romania
Abstract :
This paper presents the design, fabrication and "on wafer" characterization of membrane supported Yagi-Uda coplanar waveguide fed antennae structures, operating in the 77 GHz frequency range. The antennae were fabricated on 1.4 μm thin SiO2/Si3N4 membranes obtained by micromachining of high resistivity silicon, using backside wet etching process. The design was based on electromagnetic simulations, using Zeland IE3D software package. The antenna structures, measured "on wafer", have shown a gain of about 10 dBi. A good agreement has been observed between the experimental and simulated results.
Keywords :
antenna feeds; coplanar waveguides; millimetre wave antennas; silicon compounds; 1.4 mum; 77 GHz; Si3N4; SiO3; membrane supported Yagi-Uda coplanar waveguide fed antennae structures; on-wafer characterization; wet etching process; Biomembranes; Conductivity; Coplanar waveguides; Electromagnetic waveguides; Frequency; Micromachining; Optical device fabrication; Process design; Silicon; Wet etching;
Conference_Titel :
Semiconductor Conference, 2005. CAS 2005 Proceedings. 2005 International
Print_ISBN :
0-7803-9214-0
DOI :
10.1109/SMICND.2005.1558726
