Title :
Polymeric waveguides with bio(chemical) sensing applications-design and preliminary experimental results
Author :
Rebigan, R. ; Esinenco, D. ; Kusko, M.
Author_Institution :
Nat. Inst. for Res. Devt. in Microtechnologies, Bucharest, Romania
Abstract :
In this paper we describe the preliminary experiments for a polymeric (bio)chemical sensor-integrated on silicon substrate, based on the far-field interferometric method. The basic structure of the sensor consists of a sandwich-waveguide polymeric structure. Several experimental studies have been performed in order to optimize the technological flow. We also have performed design studies in order to optimize the proposed structure.
Keywords :
biosensors; chemical sensors; integrated optics; light interferometry; optical design techniques; optical polymers; optical sensors; optical waveguides; Si; bio(chemical) sensing; design; far-field interferometric method; polymeric waveguides; sandwich-waveguide polymeric structure; silicon substrate; Biomedical optical imaging; Biosensors; Interference; Optical interferometry; Optical sensors; Optical waveguides; Planar waveguides; Polymers; Refractive index; Waveguide transitions;
Conference_Titel :
Semiconductor Conference, 2005. CAS 2005 Proceedings. 2005 International
Print_ISBN :
0-7803-9214-0
DOI :
10.1109/SMICND.2005.1558737
