Title :
Design of Si-based micromachined slot antenna
Author :
Abdel-Aziz, M. ; Ghali, H. ; Ragaie, H.F. ; Haddara, H. ; Pons, P. ; Grenier, K. ; Plana, R.
Author_Institution :
Dept. of Electron. & Comm. Eng., Ain Shams Univ., Cairo, Egypt
Abstract :
A trenched silicon-based slot antenna over BCB membrane is investigated. Firstly, a cavity backed slot antenna on a high resistivity silicon (HRS) substrate is designed to achieve wideband performance and high radiation efficiency. The obtained bandwidth is 23% at 25.5 GHz with radiation efficiency of 99%. Then, a trench under both the CPW feed line and the antenna slots is used to replace the cavity. A parametric study is performed to examine the effect of the trench width on both the characteristic impedance of the CPW feed line and the slot antenna performance. In addition, the effect of silicon resistivity on the antenna performance is studied. The final design is based on a 20 μm BCB technology over a silicon substrate with resistivity ranging from 11 to 15 Ωcm. The obtained bandwidth is 37% at 27 GHz with radiation efficiency of 72%. The total used die area is 1 cm2.
Keywords :
antenna radiation patterns; coplanar waveguides; micromachining; silicon; slot antennas; 20 micron; 25.5 GHz; 27 GHz; BCB membrane; BCB technology; CPW feed line; HRS substrate; MEMS technology; Si-based micromachined slot antenna; antenna performance; antenna slot; cavity backed slot antenna; characteristic impedance; high resistivity silicon substrate; radiation efficiency; silicon resistivity; silicon-based slot antenna; trench width; Antenna feeds; Bandwidth; Biomembranes; Broadband antennas; Conductivity; Coplanar waveguides; Impedance; Parametric study; Silicon; Slot antennas; BCB membrane; MEMS technology; millimeter-wave applications; slot antenna;
Conference_Titel :
Circuits and Systems, 2003 IEEE 46th Midwest Symposium on
Print_ISBN :
0-7803-8294-3
DOI :
10.1109/MWSCAS.2003.1562430
