Title :
Microsensors and microactuators: operation, theory and robotics applications
Author :
El-Fouly, T.H.M. ; El-Saadany, E.F.
Author_Institution :
Dept. of Electr. & Comput. Eng., Waterloo Univ., Ont.
Abstract :
This paper surveys the state of arts of microsensors and microactuators. The first part of this survey introduces microsensors from the points of view of their classification principles of operation performance parameters and applications in robotic mechanisms. The second part concentrates on microactuators from the points of view of their classification principles of operation and of application in robotics
Keywords :
microactuators; microsensors; robots; microactuator; microsensor; operation performance parameter; robotic mechanism; robotics application; Application software; Microactuators; Microelectronics; Microsensors; Photoconductivity; Robots; Temperature dependence; Temperature sensors; Thermal conductivity; Voltage;
Conference_Titel :
Circuits and Systems, 2003 IEEE 46th Midwest Symposium on
Conference_Location :
Cairo
Print_ISBN :
0-7803-8294-3
DOI :
10.1109/MWSCAS.2003.1562433
