Title :
Photoelectric laser stimulation in a failure analysis laboratory
Author :
Firiti, A. ; Lewis, D. ; Beaudoin, F. ; Perdu, P. ; Haller, G. ; Fouillat, P.
Author_Institution :
ST Microelectron., Rousset, France
Abstract :
First photoelectric laser stimulation results (OBIC or LIVA) obtained with a laser scanning microscope which is a new version of the PHEMOS 1000 from Hamamatsu are presented. This technique is illustrated on ESD defect localization.
Keywords :
electrostatic discharge; failure analysis; lasers; optical microscopes; photoelectric devices; ESD defect localization; PHEMOS 1000; failure analysis laboratory; laser scanning microscope; photoelectric laser stimulation; Electrostatic discharge; Failure analysis; Laboratories; Laser beams; Optical beams; Optical microscopy; Photovoltaic effects; Silicon; Stimulated emission; Voltage;
Conference_Titel :
Industrial Electronics, 2004 IEEE International Symposium on
Print_ISBN :
0-7803-8304-4
DOI :
10.1109/ISIE.2004.1571789
