DocumentCode :
447810
Title :
Room temperature terahertz microbolometers
Author :
Peytavit, E. ; Agnèse, P. ; Buffet, J. L Ouvrier ; Beguin, A. ; Simoens, F.
Author_Institution :
LETI, CEA, Grenoble, France
Volume :
1
fYear :
2005
fDate :
19-23 Sept. 2005
Firstpage :
257
Abstract :
We report on the development of an array of uncooled antenna-coupled microbolometer based on an amorphous silicon thermistor. The design goal is an optical bandwidth of 0.2-1 THz with a NEP of 1 pW/Hz12 / per pixel.
Keywords :
bolometers; elemental semiconductors; silicon; submillimetre wave integrated circuits; thermistors; 0.2 to 1 THz; Si; amorphous silicon thermistor; antenna-coupled microbolometer; terahertz microbolometers; Amorphous silicon; Bolometers; Heat sinks; Low-frequency noise; Optical noise; Superconducting device noise; Temperature; Thermal resistance; Thermistors; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Infrared and Millimeter Waves and 13th International Conference on Terahertz Electronics, 2005. IRMMW-THz 2005. The Joint 30th International Conference on
Print_ISBN :
0-7803-9348-1
Type :
conf
DOI :
10.1109/ICIMW.2005.1572506
Filename :
1572506
Link To Document :
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